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Template method for fabrication of ferroelectric nanocapacitor arrays

Date: 2018-03-14
Author: network

Template method for fabrication of ferroelectric nanocapacitor arrays via ultrathin AAO templates, also called ultrathin AAO membranes. AAO template is ideal for fabrication of various ordered nanomaterials.

Template method for fabrication of ferroelectric nanocapacitor arrays

Fig. 1 Fabrication of ferroelectric nanocapacitor arrays via ultrathin AAO templates. 

Fig.1 shows the pulsed laser deposition of the ferroelectric material Pb(Zr0.20Ti0.80)O3 (PZT) through an ultrathin AAO mask onto a Pt layer on a substrate, followed by the deposition of Pt and then lift-off of the mask to leave an extended array of nanocapacitors. Typical SEM micrograph of the ultrathin AAO mask and as-prepared PZT nanoisland array with the AAO mask visible at the top of the image are also shown. The nanoisland density can be estimated by assuming that the pores are arranged hexagonally. The densities are calculated to be 176 Gb inch-2for a H2SO4-AAO mask and 68 Gb inch-2 for an H2C2O4-AAO mask.


Nature Nanotechnology 3, 402-407 (2008).

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